Cleanroom Factory Automation
Clean Storage & Transfers
Ensure Wafer Quality While Reducing Downtime
Clean factory manufacturing of 200mm and 300mm wafer chip development relies on various storage management system solutions such as automated stockers, vertical lifts, robotic handlers, and tool buffering stations. The integration of tool buffering stations with Overhead Hoist Transport (OHT) systems enable seamless and rapid wafer transfers between equipment, reducing downtime, and improving overall throughput. Automated stockers and vertical lifts ensure safe and contamination-free storage, preserving wafer quality and minimizing defects.
200mm Wafer Storage
To conquer the numerous challenges associated with storing 200mm chip wafers, from stringent cleanliness standards to contamination risks, cleanroom manufacturing facilities can incorporate Clean Stockers, Overhead Hoist Transports (OHT), Undertrack Buffers (UTBs), Side-Track Buffers (STBs) and tower/interfloor stocker and lifters.
300mm Wafer Sortation & Storage
Manufacturing facilities producing 300mm wafers in cleanroom environments require meticulous sortation and storage processes provided by High-Density Wafer Storage Systems and Material Automation Control Systems (MACS).
300mm Wafer Storage
To tackle the considerable challenges that storing 300mm chip wafers pose, including stringent cleanliness standards and contamination risks, cleanroom manufacturing facilities can incorporate automated storage solutions like Overhead Hoist Transports (OHT), Undertrack Buffers (UTBs), Side-Track Buffers (STBs), and tower/interfloor stocker and lifters.
Reticle Storage
To help navigate the intricate web of stringent regulations that cleanroom environments must adhere to, facilities involved in the production of reticles can implement a system of automated storage solutions comprised of clean stockers and Material Automation Control Systems (MACS) to minimize particle contamination and preserve the cleanliness of stored materials.
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