Reticle Storage

Enhanced Efficiency

Ensure that manufacturing equipment operates optimally through improved tool utilization.

Reduced Manual Handling

Lower operational costs by minimizing the need for manual handling.

Guaranteed Quality

Ensure reticle quality by reducing the risk of contamination or damage.

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Solution Products

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Product

Clean Stocker – CDS350

Muratec’s stockers are designed for wafer carrier storage, primarily used in 200mm and 300mm fabs, with operator integration, overhead transport, and N2/xCDA purging adaptable features. The Reticle Stocker also combines high-density reticle and mask storage, accommodating up to 1,920 reticles while adhering to ISO CLASS 1 standards through N2/xCDA purging to prevent crystal and haze growth.  

These systems are vital in maintaining semiconductor manufacturing quality by safeguarding reticles’ precision until they are utilized in lithography processes. 

How It Helps

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Product

Material Automation Control Systems (MACS)

Elevate cleanroom operations with Muratec’s advanced Material Control System (MCS) — a comprehensive command center for cleanroom AMHS systems. Whether utilizing MACS or HAS-MCS, these solutions precisely control material movement, tracking, and monitoring, optimizing fabrication flow. MACS integrates with MES systems to enhance material movement control, streamlining flow and optimizing manufacturing processes. HAS-MCS provides advanced control and coordination for managing material movement and processes within a sterile production environment, interfacing with the host system for efficient communication. Muratec’s MCS solutions — MACS or HAS-MCS — empower users with comprehensive controls, tracking, monitoring, and reporting, optimizing material flow in fabrication.

How It Helps

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