200mm Wafer Transport

Enhanced Efficiency

Maximize throughput. Minimize the risk of error. Ensure all equipment operates optimally.

Reduced Manual Handling

Reduce the need for manual handling while lowering operational costs.

Improved Inventory Management

Mitigate material shortages and excess inventory.

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Solution Products

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Product

Overhead Hoist Transport – G3XOHT

The G3X OHT represents a specialized clean factory material handling and transport solution for semiconductor manufacturing environments. Much like its counterpart, the SR350X, the G3X efficiently delivers and transports various carriers, including 300mm FOUPs, 200mm pods/boxes, and rectangle pods, directly to process tool load ports, stockers, or zero-footprint (OHB) storage areas within a clean room environment.  

This system significantly enhances work-in-progress (WIP) product transport, improving cycle time, tool utilization, yield, lot tracking, and inventory control in semiconductor factories. 

How It Helps

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Product

Overhead Hoist Transport – SRC350X

The SRC350X OHT is a specialized material handling and transport solution for clean factory environments. It utilizes a belt-driven hoisting mechanism to carry FOUPs (Front Opening Unified Pods). It transports them directly from manufacturing equipment to the following processing stations or storage locations within the clean room.  

This system significantly enhances work-in-progress (WIP) product transport efficiency in semiconductor factories, improving cycle time, tool utilization, yield, lot tracking, and inventory control. 

How It Helps

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Product

Under Track Buffer – UTB

Under track buffers (UTB) transport systems are integrated for material storage beneath the tracks. with overhead hoist transport (OHT), utilizing overhead tracks and material control systems (MCS) for carrier transport above workstations.  This configuration achieves zero-footprint storage and transport, freeing up valuable floor space for production equipment. Additionally, this setup enhances cleanliness by reducing obstructions on the cleanroom floor and maintaining stringent contamination control standards. 

OHTs (SRC350X / G3X) integrate with UTBs or STBs, carrying 300mm and 200mm FOUPs (Front Opening Unified Pods), transporting multiple carriers from the manufacturing line to storage and retrieval locations.

 

How It Helps

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Product

Side Track Buffer – STB

Side track buffers (STB) transport systems are integrated for material storage beneath the side of the tracks with overhead hoist transport (OHT), utilizing overhead tracks and material control systems (MCS) for carrier transport above workstations.  This configuration achieves zero-footprint storage and transport, freeing up valuable floor space for production equipment. Additionally, this setup enhances cleanliness by reducing obstructions on the cleanroom floor and maintaining stringent contamination control standards. 

OHTs (SRC350X / G3X) integrate with STBs or UTBs, carrying 300mm and 200mm FOUPs (Front Opening Unified Pods), transporting multiple carriers from the manufacturing line to storage and retrieval locations.

How It Helps

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Product

Cleanroom SCARA AGV – M-Series: M4

The SCARA M4 Automated Guided Vehicle (AGV) is purpose-built for clean room environments, effortlessly transporting cassettes, transportation boxes, and reticles weighing up to 1,100 lbs. Equipped with a Selective Compliance Articulated Robot Arm (SCARA), vehicles travel by floor, directly reaching the stocker and processing equipment. These specialty automated vehicles travel on complex routes via a high-accuracy navigation system, transporting carriers to the process equipment. IR transceivers are mounted on top of vehicles, communicating to IR transponders in ceiling grids.

How It Helps

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Product

Material Automation Control Systems (MACS)

Elevate cleanroom operations with Muratec’s advanced Material Control System (MCS) — a comprehensive command center for cleanroom AMHS systems. Whether utilizing MACS or HAS-MCS, these solutions precisely control material movement, tracking, and monitoring, optimizing fabrication flow. MACS integrates with MES systems to enhance material movement control, streamlining flow and optimizing manufacturing processes. HAS-MCS provides advanced control and coordination for managing material movement and processes within a sterile production environment, interfacing with the host system for efficient communication. Muratec’s MCS solutions — MACS or HAS-MCS — empower users with comprehensive controls, tracking, monitoring, and reporting, optimizing material flow in fabrication.

How It Helps

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