The SCARA M4 Automated Guided Vehicle (AGV) is purpose-built for clean room environments, effortlessly transporting cassettes, transportation boxes, and reticles weighing up to 1,100 lbs. Equipped with a Selective Compliance Articulated Robot Arm (SCARA), vehicles travel by floor, directly reaching the stocker and processing equipment. These specialty automated vehicles travel on complex routes via a high-accuracy navigation system, transporting carriers to the process equipment. IR transceivers are mounted on top of vehicles, communicating to IR transponders in ceiling grids.
Industries: Semiconductor & Technology, Healthcare & Medical
Applications: Clean Room Transfer, Production Pick-Up/Delivery
Configurations: 200mm, 300mm
SCARA is a type of industrial robot with two parallel joints that provide compliance in the X-Y plane and are rigid in the Z-axis. This design makes SCARA robots well-suited for tasks that require precise lateral movements,
High-precision navigation system enables agile movement along intricate routes, ensuring carrier transportation to process equipment.
Infrared (IR) transceivers on vehicles communicate seamlessly with ceiling-mounted IR transponders for precision guidance.