Muratec’s stockers are designed for wafer carrier storage, primarily used in 200mm and 300mm fabs, with operator integration, overhead transport, and N2/xCDA purging adaptable features. The Reticle Stocker also combines high-density reticle and mask storage, accommodating up to 1,920 reticles while adhering to ISO CLASS 1 standards through N2/xCDA purging to prevent crystal and haze growth.
These systems are vital in maintaining semiconductor manufacturing quality by safeguarding reticles’ precision until they are utilized in lithography processes.
Industries: Semiconductor & Technology, Healthcare & Medical
Applications: Storage & Retrieval
Configurations: 200mm, 300mm
Engineered for wafer carrier storage in 200mm and 300mm fabs, Muratec's stockers offer adaptable solutions.
These stockers have versatile features such as multiple operator integration, overhead transport, conveyor port systems, and N2/xCDA purging.
The CDRX Reticle Stocker combines high-density reticle and mask storage with reticle pod storage, up to 1,920 reticles, maintaining ISO CLASS 1 standards via N2/xCDA purging to prevent crystal and haze growth.